Various surface/interfacial micro/nanostructures have been widely used in solar cells 1,2,3,4, light emitting diodes 5, surface wetting and adhesion 6,7,8, metamaterials 9,10,11,12, cell biophysics 13 ...

One of the main challenges in developing semiconductor chip technology is making electronic components smaller and more effective. This difficulty is most noticeable in lithography, which is the ...